DHEX-100-50 Hexapod

DHEX-100-50 Hexapod

DHEX-100-50 Hexapod is a high-precision, six-degree-of-freedom parallel motion platform. It simply receives position commands in the Cartesian coordinate system to achieve automated motion and precise positioning across all six spatial degrees of freedom (X, Y, Z, θX, θY, θZ), thereby accomplishing complex spatial trajectory control. This platform features a compact structure, high precision, and strong stability. It supports freely definable rotation centers, is easy to operate, and simple to install. In high-precision applications such as fiber optic coupling, silicon photonics chip testing, and camera module assembly, the DHEX-100-50 Hexapod enables fast and accurate active alignment. It is also widely suitable for scenarios requiring coordinated six-DOF control, such as scientific research experiments, precision inspection, and assembly.

Application Scenarios

Active Alignment｜Fibre Coupling｜Silicon Photonics Wafer Testing｜Camera Module Assembly｜Optical Testing｜Precision Alignment｜Precision Assembly｜Scientific Research

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Product Features

Compact Design

136mm compact base, 114.3mm ultra-low starting height, enabling easy integration into limited spaces.

Ultra-High Precision

Repeatability to ±0.06 µmRepeat, meeting micro/nano-level alignment and positioning requirements.

Stable & Reliable

Innovative mechanism design effectively prevents motion

Excellent Performance

Parallel structure offers higher stiffness, lighter moving mass, faster dynamic response, and no cumulative error.

More Features

  • Stable Supply: In-house production ensures reliable delivery.
  • Fast Support: Responsive service with flexible customization.

Product Parameters

Active axes
DHEX-100-50
Travel range in X
±17 mm
Travel range in Y
±16 mm
Travel range in Z
±6.5 mm
Rotation range in θX
±10°
Rotation range in θY
±10°
Rotation range in θZ
±21°
Maximum velocity in X
20/10 mm/s*
Maximum velocity in Y
20/10 mm/s*
Maximum velocity in Z
20/10 mm/s*
Maximum angular velocity in θX
500/250 mrad/s*
Maximum angular velocity in θY
500/250 mrad/s*
Maximum angular velocity in θZ
500/250 mrad/s*
Minimum incremental motion in X
0.2 µm
Minimum incremental motion in Y
0.2 µm
Minimum incremental motion in Z
0.08 µm
Minimum incremental motion in θX
2.5 µrad
Minimum incremental motion in θY
2.5 µrad
Minimum incremental motion in θZ
5 µrad
Unidirectional repeatability in X
±0.15 µm
Unidirectional repeatability in Y
±0.15 µm
Unidirectional repeatability in Z
±0.06 µm
Unidirectional repeatability in θX
±2 µrad
Unidirectional repeatability in θY
±2 µrad
Unidirectional repeatability in θZ
±3 µrad
Backlash in X
0.2 µm
Backlash in Y
0.2 µm
Backlash in Z
0.06 µm
Backlash in θX
2 µrad
Backlash in θY
2 µrad
Backlash in θZ
4 µrad
Maximum load capacity, base plate in any orientation
2.5 kg
Maximum load capacity, base plate horizontal
5 kg
Maximum holding force, base plate in any orientation
2.5 N
Maximum holding force, base plate horizontal
15 N
*Description
The higher speed is a challenge speed, while the lower speed is the minimum guaranteed specification speed.
Using the very high speed for extended periods may lead to less smooth motion. To maximize product reliability and minimize risk, it is recommended to minimize prolonged use at the highest speeds. The lower speed specification does not negatively impact the quality or efficiency of the target application scenarios.

Applications

 

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All Product Manuals 3D Model User Guides Plugins

DHEX-100-50 Hexapod 2d

Version 202511 ・ Format PDF ・ Date 2025-11-13 Download

Hexapod Data Sheet DHEX-100-5

Version 202511 ・ Format PDF ・ Date 2025-11-13 Download

 

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